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Physical Design and Mask Synthesis for Directed Self-Assembly Lithography

 eBook
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ISBN-13:
9783319762944
Einband:
eBook
Seiten:
138
Autor:
Seongbo Shim
Serie:
NanoScience and Technology
eBook Typ:
PDF
eBook Format:
PDF
Kopierschutz:
1 - PDF Watermark
Sprache:
Englisch
Beschreibung:

This book discusses physical design and mask synthesis of directed self-assembly lithography (DSAL). It covers the basic background of DSAL technology, physical design optimizations such as placement and redundant via insertion, and DSAL mask synthesis as well as its verification. Directed self-assembly lithography (DSAL) is a highly promising patterning solution in sub-7nm technology.