Physical Design and Mask Synthesis for Directed Self-Assembly Lithography

 Book
Sofort lieferbar | Lieferzeit:3-5 Tage I

117,69 €*

Alle Preise inkl. MwSt. | zzgl. Versand
ISBN-13:
9783319762937
Einband:
Book
Erscheinungsdatum:
01.04.2018
Seiten:
138
Autor:
Seongbo Shim
Gewicht:
393 g
Format:
245x164x17 mm
Serie:
NanoScience and Technology
Sprache:
Englisch
Beschreibung:

Introduces a highly promising patterning solution for next generation technology
This book discusses physical design and mask synthesis of directed self-assembly lithography (DSAL). It covers the basic background of DSAL technology, physical design optimizations such as placement and redundant via insertion, and DSAL mask synthesis as well as its verification. Directed self-assembly lithography (DSAL) is a highly promising patterning solution in sub-7nm technology.